Nanoscale Metrology
Scanning Probe Microscopy (SPM)
Atomic Force Microscopy (AFM)
Scanning Electron Microscopy (SEM)
Transmission Electron Microscopy (TEM)
X-Ray Diffraction (XRD)
X-Ray Photoemission Spectroscopy (XPS)
Auger Electron Spectroscopy (AES)
Electron Energy Loss Spectroscopy (EELS)
Focused Ion Beam Metrology (FIB)
Raman Spectroscopy
Photoluminescence
Near-Field Optical Microscopy (NSOM)
Materials Growth and Deposition
Molecular Beam Epitaxy (MBE)
Metal-Organic Chemical Vapor Deposition (MOCVD)
Plasma-Enhanced Chemical Vapor Deposition (PECVD)
Halide Vapor-Phase Epitaxy (HVPE)
Pulsed Laser Deposition (PLD)
Atomic Layer Deposition (ALD)
Nanoelectronics and Microelectronics
Molecular Electronics
Nanowire Electronics
Carbon Nanotube Electronics
Silicon Microelectronics
Compound Semiconductor Devices
Wide Bandgap Semiconductor Devices
Thermophotovoltaic Energy Conversion
Solar Cells
Nanofabrication
Optical Photolithography (resolution to ~ 2 µm)
Electron-Beam Lithography (resolution to ~ 10 nm)
Optical Mask Generation
Reactive Ion Etching (RIE)
Plasma Etching
Wet Chemical Processing
Electron Beam Evaporation
Thermal Evaporation
Sputter Deposition
Thermal Oxidation
Rapid Thermal Processing (RTP) |
Electronic Characterization
Current-Voltage Metrology (µV to 10 kV)
Capacitance-Voltage Metrology
Admittance-Voltage Metrology
Admittance-Frequency Metrology
Deep Level Transient Spectroscopy (DLTS)
Photoresponse Metrology
Hall Effect Metrology
Microwave Characterization (to over 200 GHz)
Temperature Characterization (10 – 650 K)
Nanophotonics
Laser-Based Microfluidic Diagnostics
Nanoscale Photonic Devices and Phenomena
Spectrophotometry
Interference Lithography
Bio-Nanotechnology and Nano-Chemistry
Devices for Cellular and Molecular Biology
Micro- and Nanoscale Biological Sensor Technology
Biological Micro-Electromechanical Systems (Bio-MEMS)
Fluorescence Microscopy
Chemical Synthesis
Electro-Synthesis
Nanoparticle Synthesis
Analytic Chemistry
Fourier-Transform Infrared Spectrometry (FTIR)
Theory and Computation
Computational Nanotechnology
Theory of Conduction in Nanoscale Systems
Computational Infrastructure Development |
